Transducer Science and Technology

The aim of the project Parallel plate structures for optical modulation within MEMPHIS is to investigate the realization and control of micromachined plates, suspended at extremely small distance above the substrate. Such plates are basic building blocks in many applications, e.g. power sensors, optical modulation using a mechanical structure in evanescent field, electro-mechanical tuning and electrical and optical switches.

Within the Clemps project (Closed-Loop Embedded MEMS-based Precision Stage) we investigate the fabrication of MEMS-based stages with up to three degrees of freedom. These stages are to be used in, for example, transmission electron microscopy applications and probe based data storage. The project is a close cooperation with the MA group of IMPACT.

Within the Coriolis Based SAS project, we investigate a Mass Flow Sensor based on the vibrating tube principle using Coriolis force. The goal is to design and fabricate a micro Coriolis mass flow sensor with a nominal flow range of 1 µl/h and a minimal flow of less than 10nl/h.

Quantitative assessment of physical interaction of the human body with the environment is the objective of the PowerSensor project. It involves the development of miniature sensors measuring acceleration and force, sensor configurations and algorithms for assessing dynamic interaction for arbitrary movements.

During the past years, cricket-inspired hair flow sensors have been developed successfully in our group using MEMS-technology. The current generation sensors allow for measurement of air flow velocities down to sub-mm/s. To improve the performance of these flow sensors even further, we will use non-linear effects.

The micro valve for precise dosing (Mivado) project focuses on the design and fabrication of a micromachined proportional control valve, capable of regulating very small flows with high precision, and offering standard closure with very low leakage. In combination with the Coriolis mass flow sensor (see above), this can be used to create an integrated mass flow controller at the micro scale.

The Acoustic Passive RAdar (APRA) project focuses on the measurement of acoustic sound fields. These fields consist of a combination of pressure variations around atmospheric pressure and vibrations of the air molecules (particle velocity). By measuring the complete particle velocity field, one can detect the direction of sound.